Category: ZYGO

OEM 3D Optical Profiler Systems

Leverage and integrate our industry-leading technology

Do you have a need for precise, high-speed, non-contact surface metrology and inspection?

Are you an OEM manufacturer or system integrator looking to partner with a leading company

with the experience to ensure your success? ZYGO’s 3D Optical profilers are now available

as a fully integrable solution with a long history of successful production integrations.

Why partner with ZYGO?

We bring decades of experience working with OEM manufacturers serving critical in-line

metrology, inspection and process control for advanced manufacturing applications.

Key industries served include:

• Consumer Electronics

• Automotive & Precision Machining

• Semiconductor

• Optics & Photonics

Why ZYGO technology?

We are experts in Coherence Scanning Interferometry (CSI). Our innovative and

differentiated enables the most precise and fastest measurement of surface topography.

3D areal surface roughness, step heights, flatness, film thickness, micro-geometry and

more are quantified down to sub-nanometer levels – with a single sensor solution.

• High-speed scanning and data processing for optimal throughput.

• Fully automated functionality and control of all hardware systems.

• Remote access API enables simple and complete control of the Mx™ software.

• Built in python scripting for creating custom functions and analyses.

Our experienced team of engineers and scientists are available to discuss your requirements

and metrology needs and can recommend optimal configurations to address your specific

requirements for speed, field-of-view, and part geometries. We look forward to partnering

with you on your next successful program.

Optimize efficiency by using your ZYGO optical profiler right on the shop floor.

Now you can meet the most rigorous standards for precision metrology under

challenging environmental conditions. Our Guardian™ enclosures isolate the

metrology core from the surrounding environment, so you get optimal performance

when and where you need it. Designed and built by ZYGO exclusively for our optical

profilers, Guardian™ enclosures are built to perform and last.

Ergonomic Design

The system is designed to be a self-contained unit, which can be operated from standing

or seated positions. All user interface peripherals can be positioned and adjusted.

A large front-side opening makes the task of loading and unloading test parts and fixtures

simple and efficient. The unit’s interior lighting conveniently illuminates the work area

as well. For serviceability, access panels are also provided around the unit.

Durable, ergonomic and compact, the Guardian™ industrial enclosure for ZYGO 3D Optical

Profilers provides protection from harsh environments, while maintaining performance and

functionality.

Key Features:

• Isolated metrology core

• Compact footprint

• Acoustical damping side panels

• Ergonomic controls

• Large access door with cover

• Removable access panels for serviceability

• Workspace lighting

• Electronics cooling

• High quality build and finish

• Designed and built specifically for ZYGO optical profilers

Maximize ROI

The Nexview™ 650 has been designed and built to ensure that the system

provides value for years to come.  With a metrology area that accommodates

lateral dimensions up to 650 x 650 mm and sample load of > 100 kg,

a vertical range of 150 mm, and options for a fully enclosed, or partially

enclosed system, the Nexview™ 650 provides maximum flexibility for large

samples that require precision 3D optical profiling.

For example. The system accommodates:

Any of today’s standard PCB substrate panel sizes

Custom defined sample holders for flexible sheets, etc. which can be deployed

with little concern for their mass on the high load Y stage Large, high mass

injection molding plates that benefit from precise non-contact inspection to

minimize potential precision surface damage Customized chucks and sample

holders can be designed or customer supplied to adapt the system for smaller

panels or even singulated substrates to maximize application flexibility.

And the system’s integrated recipe-driven automation software enables

hands-free metrology of multiple features on each panel, all in a single

workstation, reducing production time and increasing process knowledge.

The Nexview™ 650 metrology system is an inspection tool for automated

measurement of injection molding tooling, PCBs, glass panels and other

samples requiring an extended work volume up to 650 x 650 mm.

It provides 2D & 3D measurements of a variety of surface features with

sub-nanometer vertical precision and sub-micron lateral precision.

Powerful Performance

Coherence Scanning Interferometry (CSI) is the measurement technology

at the core of the Nexview™ 650 system.

This non-contact technique provides high-precision, and high-value surface

metrology benefits including:

• Measures virtually all types of surfaces, from rough to super smooth,

including thin films, steep slopes, and large steps.

• Sub-nanometer measurement precision is independent of field magnification

• Gage capable performance – exceptional precision and repeatability for the

most demanding production applications.

• SureScan™ vibration tolerance technology – robust operation in virtually any

environment.

• Mx™ software enables seamless data exchange with other ZYGO Profilers

including ZeGage™ Pro, NewView™ 9000. and Nexview™ NX2.

Performance, Value, and Versatility

Flexibility is the hallmark of ZYGO’s NewView products. The NewView 9000 profiler offers

exceptional value with applications as varied as flatness, roughness and waviness, thin films,

step heights and more.

All NewView 9000 profilers are equipped with a triple-zoom turret which can be populated

with discrete zoom optics tailor made for the system. Sample staging configurations range

from completely manual to fully automated with encoded travel.

Regardless of your configuration, all NewView 9000 systems offer high-accuracy measurements,

ease of use, and fast measurements, all at an attractive price point that make it the ideal choice

for versatility and value in 3D optical profilers.

Some of the differentiated features targeted at making users’ metrology better, faster, and more reliable:

• Large-area 1.9 MP sensor with high sensitivity lets you see more in a single measurement

• High-speed measurements take only seconds for improved productivity and process control

• Automated part focus and setup minimizes operator variability and training while reducing the

time to data

• Gage-capable performance through exceptional precision and repeatability for the most demanding

production applications.

• Vibration robust metrology with SureScan technology and available built-in isolation enables high

quality metrology even in vibration-prone environments

• SmartPSI™ technology for ultra-fast profiling of ultra-smooth surfaces

• 2D and 3D correlation provides confidence in your measurements with results that comply to ISO

25178 and ISO 4287 standards.

• Mx™ software for instrument control, analysis, and measurement automation

The NewView™ 9000 3D optical surface profiler provides powerful versatility in non-contact

optical surface profiling. With the system, it is easy and fast to measure a wide range of 

surface types, including smooth, rough, flat, sloped, and stepped. All measurements are

nondestructive, fast, and require no sample preparation.

At the core of the system is ZYGO’s Coherence Scanning Interferometry (CSI) technology

which delivers sub-nanometer precision at all magnifications, and measures a wider range

of surfaces faster and more precisely than other commercially-available technologies,

thus optimizing your return on investment.

Flexible Configurations

NewView 9000 Stage & Work AreaThe NewView 9000 profiler features an open work area, with

clear lines of sight, to help make measurement setups and changeovers simple and quick.

Systems can be equipped with a variety of sample staging that range from fully manual X/Y and

tilt stages, to fully automated stages with 150 mm of travel and 4 degrees of tilt. With the integrated

isolation system and compact size, it is well suited for benchtop installations; using the optional stand

and workstation make an ideal production-style system.

The Only Profiler You Need

You no longer have to select a profiler based on the type of surface you want to measure.

The Nexview™ NX2 profiler measures topography of virtually any surface from a super

polished optical surface with sub-Angstrom surface roughness, to steep machined angles up

to 85 degrees. It does all this in 3D, without contact, and provides the best qualities of other

profiling technologies (stylus, confocal, focus scanning) without their shortcomings.

Additional application modules for specific needs, such as measurement in the presence of 

transparent films, and 2D vision analysis, are available for customers that require these capabilities.

Automated Operation

The Nexview™ NX2 profiler is a fly-by-wire tool with no manual controls, so it can be fully

automated with programmed sequences to measure multiple areas of a surface, multiple parts

in a tray, or larger surfaces by stitching together multiple measurements into a single measurement.

Clean, Streamlined, Design

The Nexview NX2 profiler features a large work area with clear lines of sight to help make

measurement setups and changeovers simple and quick.

Its automated 200 mm integrated measurement stage is the epitome of clean and efficient

industrial design. It features an embedded ±4 degree high load tilt stage with parcentric correction

– which makes aligning the measurement surface simple, even for featureless samples.

Nexview™ NX2 3D Optical Profiler

Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler

combines exceptional precision, advanced algorithms, application flexibility,

and automation into a single package that represents ZYGO’s most advanced

Coherence Scanning Interferometric (CSI) profiler.

The completely non-contact technology optimizes the return on investment by delivering

sub-nanometer precision at all magnifications and measuring a wider range of surfaces

faster and more precisely than other comparable technologies commercially available.

With applications as varied as flatness, roughness and waviness, thin films, step heights

and more on virtually any surface and material, Nexview NX2 truly is the no-compromise

profiler.

As the latest generation flagship, Nexview™ NX2 provides a wide range of differentiated

features targeted at making users’ metrology better, faster, and more reliable:

• Large-area 1.9 MP sensor with high sensitivity lets you see more in a single measurement

• High-speed measurements take only seconds for improved productivity and process control

• Automated part focus and setup minimizes operator variability and training while reducing

the time to data

• Gage capable performance through exceptional precision and repeatability for the most

demanding production applications.

• Vibration robust metrology with SureScan technology and built in isolation enables high

quality metrology even in vibration-prone environments

• SmartPSI™ technology for ultra-fast profiling of ultra-smooth surfaces

• 2D and 3D correlation provides confidence in your measurements with results that comply

to ISO 25178 and ISO 4287 standards.

• Mx™ software for instrument control, analysis, and measurement automation

• True Color imaging for enhanced visualization

• Variable image zoom with three included zoom lenses lets users optimize the field of view

and maximize instrument flexibility